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NASA NTRS · 20060035352

A LIGA Fabricated Quadrupole Array for Mass Spectroscopy

Abstract

A linear array of nine quadrupoles was fabricated using the LIGA process. Pole heights ranging from 1 to 3 mm were fabricated using synchrotron X-ray exposures to form free standing polymethylmethacrylate (PMMA) molds into which copper, gold or nickel were electroplated.

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BibTeXRIS

Jackson, K., Wiberg, D. V., Hecht, M. H., Orient, O. J., Chutjian, A., Yee, K., Fuerstenau, S., Brennen, R. A., Hruby, J., Bonivert, W.. 1997-06-20. A LIGA Fabricated Quadrupole Array for Mass Spectroscopy. https://ntrs.nasa.gov/citations/20060035352

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