NASA NTRS · 20060041264
Advancements in MEMS Materials and Processing Technology
Abstract
From achievements in display imaging to air bag deployment, microelectromechanical systems are becoming more commonplace in everyday life. With an abundance of opportunities for innovative R&D in the field, the research trends are not only directed toward novel sensor and actuator development, but also toward further miniaturization, specifically achieving micro- and nanoscaled intergrated systems.
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Olivas, J. D., Bolin, S. R.. 1998-05-01. Advancements in MEMS Materials and Processing Technology. https://ntrs.nasa.gov/citations/20060041264
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