Deep Reactive-Ion Etched Micro Valves for Spacecraft Propulsion

Tang, W.; Chakraborty, I.; Pyle, D.

NASA NTRS · 20060041591

Deep Reactive-Ion Etched Micro Valves for Spacecraft Propulsion

Tang, W.·Chakraborty, I.·Pyle, D.

View original source ↗Export metadata ↓

Abstract

We report on the design, and test setup of a silicon diaphragm micro valve.

Explore related subjects

MEMS valve deep Reactive-Ion Etching Propulsion

Keep this discovery

Explore connections, maps & timelines

BibTeX RIS

Tang, W., Chakraborty, I., Pyle, D.. 1998-11-01. Deep Reactive-Ion Etched Micro Valves for Spacecraft Propulsion. https://ntrs.nasa.gov/citations/20060041591

Cite the original work for its findings. Save a collection to share your selection of sources.