NASA NTRS · 20060042045
Gas Sensor Test Chip
Abstract
A new test chip is being developed to characterize conducting polymers used in gas sensors. The chip, a seven-layer cofired alumina substrate with gold electrodes, contains 11 comb and U- bend test structures. These structures are designed to measure the sheet resistance, conduction anisotropy, and peripheral conduction of spin-coated films that are not subsequently patterned.
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Buehler, M., Ryan, M.. 1995-01-01. Gas Sensor Test Chip. https://ntrs.nasa.gov/citations/20060042045
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