Technology opportunity: piezoelectric MEMS microvalves

Zeller, Martin

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NASA NTRS · 20060042963

Technology opportunity: piezoelectric MEMS microvalves

Zeller, Martin

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Abstract

Jet Propulsion Laboratory is looking for U.S. companies to license and further develop its family of piezoelectric MEMS microvalve technologies.

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Zeller, Martin. 2005-01-01. Technology opportunity: piezoelectric MEMS microvalves. https://ntrs.nasa.gov/citations/20060042963

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