Single Crystal Silicon Instrument Mirrors

Abstract

The goals for the fabrication of single crystal silicon instrument mirrors include the following: 1) Develop a process for fabricating lightweight mirrors from single crystal silicon (SCS); 2) Modest lightweighting: 3X to 4X less than equivalent solid mirror; 3) High surface quality, better than lambda/40 RMS @ 633nm; 4) Significantly less expensive than current technology; and 5) Negligible distortion when cooled to cryogenic temperatures.