Non-contact thickness measurement using UTG

Abstract

A measurement structure for determining the thickness of a specimen without mechanical contact but instead employing ultrasonic waves including an ultrasonic transducer and an ultrasonic delay line connected to the transducer by a retainer or collar. The specimen, whose thickness is to be measured, is positioned below the delay line. On the upper surface of the specimen a medium such as a drop of water is disposed which functions to couple the ultrasonic waves from the delay line to the specimen. A receiver device, which may be an ultrasonic thickness gauge, receives reflected ultrasonic waves reflected from the upper and lower surface of the specimen and determines the thickness of the specimen based on the time spacing of the reflected waves.