Interferometric system for precision imaging of vibrating structures

Abstract

An optical profiler is modified in a way which allows it to image a MEMS device at various points during the movement of the MEMS device. The light source is synchronized with a desired movement of the MEMS device. The light source produces pulse at each synchronization period. During each pulse, an interferometric measurement is carried out. So long as the pulse is short enough such that the device does not move significantly, a detection of the position of the device can be accurately obtained.