NASA NTRS · 20080005154
Silicon micromachined broad band light source
Abstract
A micro electromechanical system (MEMS) broad band incandescent light source includes three layers: a top transmission window layer; a middle filament mount layer; and a bottom reflector layer. A tungsten filament with a spiral geometry is positioned over a hole in the middle layer. A portion of the broad band light from the heated filament is reflective off the bottom layer. Light from the filament and the reflected light of the filament are transmitted through the transmission window. The light source may operate at temperatures of 2500 K or above. The light source may be incorporated into an on board calibrator (OBC) for a spectrometer.
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George, Thomas, Jones, Eric, Tuma, Margaret L., Eastwood, Michael, Hansler, Richard. 2004-09-28. Silicon micromachined broad band light source. https://ntrs.nasa.gov/citations/20080005154
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