NASA NTRS · 20080008660
Polymer based tunneling sensor
Abstract
A process for fabricating a polymer based circuit by the following steps. A mold of a design is formed through a lithography process. The design is transferred to a polymer substrate through a hot embossing process. A metal layer is then deposited over at least part of said design and at least one electrical lead is connected to said metal layer.
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Cui, Tianhong, Wang, Jing, Zhao, Yongjun. 2006-08-22. Polymer based tunneling sensor. https://ntrs.nasa.gov/citations/20080008660
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