NASA NTRS · 20080018606
A Micromachined Geometric Moire Interferometric Floating-Element Shear Stress Sensor
Abstract
This paper presents the development of a floating-element shear stress sensor that permits the direct measurement of skin friction based on geometric Moir interferometry. The sensor was fabricated using an aligned wafer-bond/thin-back process producing optical gratings on the backside of a floating element and on the top surface of the support wafer. Experimental characterization indicates a static sensitivity of 0.26 microns/Pa, a resonant frequency of 1.7 kHz, and a noise floor of 6.2 mPa/(square root)Hz.
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Horowitz, S., Chen, T., Chandrasekaran, V., Tedjojuwono, K., Nishida, T., Cattafesta, L., Sheplak, M.. 2004-01-05. A Micromachined Geometric Moire Interferometric Floating-Element Shear Stress Sensor. https://ntrs.nasa.gov/citations/20080018606
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