NASA NTRS · 20080018607
A Wafer-Bonded, Floating Element Shear-Stress Sensor Using a Geometric Moire Optical Transduction Technique
Abstract
This paper presents a geometric Moir optical-based floating-element shear stress sensor for wind tunnel turbulence measurements. The sensor was fabricated using an aligned wafer-bond/thin-back process producing optical gratings on the backside of a floating element and on the top surface of the support wafer. Measured results indicate a static sensitivity of 0.26 microns/Pa, a resonant frequency of 1.7 kHz, and a noise floor of 6.2 mPa/(square root)Hz.
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Horowitz, Stephen, Chen, Tai-An, Chandrasekaran, Venkataraman, Tedjojuwono, Ken, Cattafesta, Louis, Nishida, Toshikazu, Sheplak, Mark. 2004-06-06. A Wafer-Bonded, Floating Element Shear-Stress Sensor Using a Geometric Moire Optical Transduction Technique. https://ntrs.nasa.gov/citations/20080018607
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