NASA NTRS · 20080020443
Sensor chip and apparatus for tactile and/or flow sensing
Abstract
A sensor chip, comprising a flexible, polymer-based substrate, and at least one microfabricated sensor disposed on the substrate and including a conductive element. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes.
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Liu, Chang, Chen, Jack, Engel, Jonathan. 2008-04-15. Sensor chip and apparatus for tactile and/or flow sensing. https://ntrs.nasa.gov/citations/20080020443
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