NASA NTRS · 20090032109
Improved Controller for a Three-Axis Piezoelectric Stage
Abstract
An improved closed-loop controller has been built for a three-axis piezoelectric positioning stage. The stage can be any of a number of commercially available or custom-made units that are used for precise three-axis positioning of optics in astronomical instruments and could be used for precise positioning in diverse fields of endeavor that include adaptive optics, fabrication of semiconductors, and nanotechnology.
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Rao, Shanti, Palmer, Dean. 2009-09-01. Improved Controller for a Three-Axis Piezoelectric Stage. https://ntrs.nasa.gov/citations/20090032109
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