Objective Lens Optimized for Wavefront Delivery, Pupil Imaging, and Pupil Ghosting

Abstract

An interferometer objective lens (or diverger) may be used to transform a collimated beam into a diverging or converging beam. This innovation provides an objective lens that has diffraction-limited optical performance that is optimized at two sets of conjugates: imaging to the objective focus and imaging to the pupil. The lens thus provides for simultaneous delivery of a high-quality beam and excellent pupil resolution properties.