NASA NTRS · 20100006910
Structure for implementation of back-illuminated CMOS or CCD imagers
Abstract
A structure for implementation of back-illuminated CMOS or CCD imagers. An epitaxial silicon layer is connected with a passivation layer, acting as a junction anode. The epitaxial silicon layer converts light passing through the passivation layer and collected by the imaging structure to photoelectrons. A semiconductor well is also provided, located opposite the passivation layer with respect to the epitaxial silicon layer, acting as a junction cathode. Prior to detection, light does not pass through a dielectric separating interconnection metal layers.
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Pain, Bedabrata, Cunningham, Thomas J.. 2009-11-10. Structure for implementation of back-illuminated CMOS or CCD imagers. https://ntrs.nasa.gov/citations/20100006910
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