NASA NTRS · 20100017561
Micromachined Artificial Haircell
Abstract
A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.
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Liu, Chang, Engel, Jonathan, Chen, Nannan, Chen, Jack. 2010-02-16. Micromachined Artificial Haircell. https://ntrs.nasa.gov/citations/20100017561
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