Low-Dead-Volume Inlet for Vacuum Chamber

Abstract

Gas introduction from near-ambient pressures to high vacuum traditionally is accomplished either by multi-stage differential pumping that allows for very rapid response, or by a capillary method that allows for a simple, single-stage introduction, but which often has a delayed response. Another means to introduce the gas sample is to use the multi-stage design with only a single stage. This is accomplished by using a very small conductance limit. The problem with this method is that a small conductance limit will amplify issues associated with dead -volume. As a result, a high -vacuum gas inlet was developed with low dead -volume, allowing the use of a very low conductance limit interface. Gas flows through the ConFlat flange at a relatively high flow rate at orders of magnitude greater than through the conductance limit. The small flow goes through a conductance limit that is a double-sided ConFlat.