NASA NTRS · 20100024444
Carbon nanotube growth density control
Abstract
Method and system for combined coarse scale control and fine scale control of growth density of a carbon nanotube (CNT) array on a substrate, using a selected electrical field adjacent to a substrate surface for coarse scale density control (by one or more orders of magnitude) and a selected CNT growth temperature range for fine scale density control (by multiplicative factors of less than an order of magnitude) of CNT growth density. Two spaced apart regions on a substrate may have different CNT growth densities and/or may use different feed gases for CNT growth.
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Delzeit, Lance D., Schipper, John F.. 2010-04-27. Carbon nanotube growth density control. https://ntrs.nasa.gov/citations/20100024444
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