Optical Profilometers Using Adaptive Signal Processing

Abstract

A method of adaptive signal processing has been proposed as the basis of a new generation of interferometric optical profilometers for measuring surfaces. The proposed profilometers would be portable, hand-held units. Sizes could be thus reduced because the adaptive-signal-processing method would make it possible to substitute lower-power coherent light sources (e.g., laser diodes) for white light sources and would eliminate the need for most of the optical components of current white-light profilometers. The adaptive-signal-processing method would make it possible to attain scanning ranges of the order of decimeters in the proposed profilometers.