Split-Resonator, Integrated-Post Vibratory Microgyroscope

Abstract

An improved design for a capacitive-sensing, rocking-mode vibratory microgyroscope is more amenable to mass production, relative to a prior design. Both the improved design and the prior design call for a central post that is part of a resonator that partly resembles a cloverleaf or a flower. The prior design is such that the post has to be fabricated as a separate piece, then bonded to the rest of the resonator in the correct position and orientation. The improved design provides for fabrication of the post as an integral part of the resonator and, in so doing, makes it possible to produce a waferful of microgyroscopes, without need to fabricate, position, and attach posts.