NASA NTRS · 20110023519
Method of fabricating a whispering gallery mode resonator
Abstract
A method of fabricating a whispering gallery mode resonator (WGMR) is provided. The WGMR can be fabricated from a particular material, annealed, and then polished. The WGMR can be repeatedly annealed and then polished. The repeated polishing of the WGMR can be carried out using an abrasive slurry. The abrasive slurry can have a predetermined, constant grain size. Each subsequent polishing of the WGMR can use an abrasive slurry having a grain size that is smaller than the grain size of the abrasive slurry of the previous polishing iteration.
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Savchenkov, Anatoliy A., Matkso, Andrey B., Iltchenko, Vladimir S., Maleki, Lute. 2011-11-15. Method of fabricating a whispering gallery mode resonator. https://ntrs.nasa.gov/citations/20110023519
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