Automated Serial Sectioning for 3D Reconstruction

Abstract

Some aspects of an apparatus and method for automated serial sectioning of a specimen of a solder, aluminum, or other relatively soft opaque material are discussed. The apparatus includes a small milling machine (micromiller) that takes precise, shallow cuts (increments of depth as small as 1 micron) to expose successive sections. A microscope equipped with an electronic camera, mounted in a fixed position on the micromiller, takes pictures of the newly exposed specimen surface at each increment of depth. The images are digitized, and the resulting data are subsequently processed to reconstruct three-dimensional (3D) features of the specimen.