High-Speed Digital Interferometry

Abstract

Digitally enhanced heterodyne interferometry (DI) is a laser metrology technique employing pseudo-random noise (PRN) codes phase-modulated onto an optical carrier. Combined with heterodyne interferometry, the PRN code is used to select individual signals, returning the inherent interferometric sensitivity determined by the optical wavelength. The signal isolation arises from the autocorrelation properties of the PRN code, enabling both rejection of spurious signals (e.g., from scattered light) and multiplexing capability using a single metrology system. The minimum separation of optical components is determined by the wavelength of the PRN code.