NASA NTRS · 20130000081
Enabling High Performance Instruments for Astronomy and Space Exploration and ALD
Abstract
Benefits of ALD for NASA instruments and applications: a) Ultrathin, highly conformal, and uniform films over arbitrarily large surface area. b). High quality films (density, roughness, conductivity, etc.) . Angstrom level control of stoichiometry, interfaces, and surface properties: 1) Multilayer nanolaminates/nanocomposites. 2) Low temperature surface engineering. Flight applications enabled by ALD: a) Anti-reflective coatings/Mirrors/Filters/Optics for UV/Vis/NIR Detectors. b) Superconducting Films for Submillimeter Astronomy.
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Greer, Frank, Lee, M. C., Hoenk, M. E., Jones, T. J., Jacquot, B. C., Dickie, M., Monacos, S., Nikzad, S., Day, P., Leduc, R., Hamden, E., Schiminovich, D., Beasley, M., Gantner, B., Morrissey, P., Martin, C.. 2012-06-20. Enabling High Performance Instruments for Astronomy and Space Exploration and ALD. https://ntrs.nasa.gov/citations/20130000081
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