NASA NTRS · 20210002818
Technical Challenges in Reliable MicroelectroniCs Packaging of Microelectromechanical Systems (MEMS) for Space Applications
Abstract
MEMS have shown a significant promise in the last decade for a variety of applications such as air-bag, pressure sensors, accelerometer, microgyro, chemical sensors, artificial nose, etc.
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Ramesham, R.. 1999-05-01. Technical Challenges in Reliable MicroelectroniCs Packaging of Microelectromechanical Systems (MEMS) for Space Applications. https://ntrs.nasa.gov/citations/20210002818
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