NASA NTRS · 20210004999
Total Dose Effects on Microelectromechanical Systems (MEMS): Accelerometers
Abstract
Microelectromechanical sensors, ADXL50 and XMMAS40G accelerometers, which are fabricated with surface micromachining techniques are characterized for total dose radiation. An unusual failure mechanism that appears to be associated with the sensor was observed and presented in this paper.
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Lyke, J., Barnes, C. E., Tang, W. C., Johnston, A. H., Lee, C. I.. 1996-07-15. Total Dose Effects on Microelectromechanical Systems (MEMS): Accelerometers. https://ntrs.nasa.gov/citations/20210004999
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