Planar controlled zone microwave plasma system

Ripley, Edward B; Seals, Roland D; Morrell, Jonathan S

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DOE OSTI · 1029315

Planar controlled zone microwave plasma system

Ripley, Edward B·Seals, Roland D·Morrell, Jonathan S

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Abstract

An apparatus and method for initiating a process gas plasma. A conductive plate having a plurality of conductive fingers is positioned in a microwave applicator. An arc forms between the conductive fingers to initiate the formation of a plasma. A transport mechanism may convey process materials through the plasma. A spray port may be provided to expel processed materials.

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Ripley, Edward B, Seals, Roland D, Morrell, Jonathan S. 2011-10-04. Planar controlled zone microwave plasma system. https://www.osti.gov/biblio/1029315

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