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DOE OSTI · 1037764

Contact stress sensor

Kotovsky, Jack
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Abstract

A contact stress sensor includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a thermal compensator and a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.

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BibTeXRIS

Kotovsky, Jack. 2012-02-07. Contact stress sensor. https://www.osti.gov/biblio/1037764

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