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DOE OSTI · 1080290

Substrate comprising a nanometer-scale projection array

Cui, Yi·Zhu, Jia·Hsu, Ching-Mei·Connor, Stephen T·Yu, Zongfu·Fan, Shanhui·Burkhard, George
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Abstract

A method for forming a substrate comprising nanometer-scale pillars or cones that project from the surface of the substrate is disclosed. The method enables control over physical characteristics of the projections including diameter, sidewall angle, and tip shape. The method further enables control over the arrangement of the projections including characteristics such as center-to-center spacing and separation distance.

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Cui, Yi, Zhu, Jia, Hsu, Ching-Mei, Connor, Stephen T, Yu, Zongfu, Fan, Shanhui, Burkhard, George. 2012-11-27. Substrate comprising a nanometer-scale projection array. https://www.osti.gov/biblio/1080290

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