DOE OSTI · 1124617
Contact stress sensor
Abstract
A method for producing a contact stress sensor that includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.
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Kotovsky, Jack. 2014-02-11. Contact stress sensor. https://www.osti.gov/biblio/1124617
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