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DOE OSTI · 1167207

System and method for compressive scanning electron microscopy

Reed, Bryan W
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Abstract

A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.

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BibTeXRIS

Reed, Bryan W. 2015-01-13. System and method for compressive scanning electron microscopy. https://www.osti.gov/biblio/1167207

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