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DOE OSTI · 1178243

Multilayer moisture barrier

Pankow, Joel W·Jorgensen, Gary J·Terwilliger, Kent M·Glick, Stephen H·Isomaki, Nora·Harkonen, Kari·Turkulainen, Tommy
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Abstract

A moisture barrier, device or product having a moisture barrier or a method of fabricating a moisture barrier having at least a polymer layer, and interfacial layer, and a barrier layer. The polymer layer may be fabricated from any suitable polymer including, but not limited to, fluoropolymers such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), or ethylene-tetrafluoroethylene (ETFE). The interfacial layer may be formed by atomic layer deposition (ALD). In embodiments featuring an ALD interfacial layer, the deposited interfacial substance may be, but is not limited to, Al.sub.2O.sub.3, AlSiO.sub.x, TiO.sub.2, and an Al.sub.2O.sub.3/TiO.sub.2 laminate. The barrier layer associated with the interfacial layer may be deposited by plasma enhanced chemical vapor deposition (PECVD). The barrier layer may be a SiO.sub.xN.sub.y film.

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36 MATERIALS SCIENCE37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

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Pankow, Joel W, Jorgensen, Gary J, Terwilliger, Kent M, Glick, Stephen H, Isomaki, Nora, Harkonen, Kari, Turkulainen, Tommy. 2015-04-21. Multilayer moisture barrier. https://www.osti.gov/biblio/1178243

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