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DOE OSTI · 1440018

Quantitative secondary electron detection

Agrawal, Jyoti·Joy, David C.·Nayak, Subuhadarshi
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Abstract

Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.

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BibTeXRIS

Agrawal, Jyoti, Joy, David C., Nayak, Subuhadarshi. 2018-05-08. Quantitative secondary electron detection. https://www.osti.gov/biblio/1440018

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