Semiconductor-based detection and decontamination system

Abstract

A system and method for identifying and making quantitative determinations of different deposits on a portion thereof, determining that the deposit is a contaminant and decontaminating at least the portion of the system is disclosed. The system comprises a controller, a sensing portion and a decontamination portion. The controller contains information about at least one noncontaminant. The sensing portion communicates with at least the controller and the portion of the system and is adapted to detect the deposit. The decontaminating portion communicates with at least the controller and is adapted to decontaminate the portion of the system.