Magnetoelastic sensor for analyzing strain

Abstract

A magnetoelastic sensor is provided for analyzing strain induced by a force causing mechanical deformation of a region of a substrate. The sensor includes a substrate that has a non-deformable region and a mechanically deformable region, the mechanically deformable region coupled to the non-deformable region by a linking structure. The sensor also has a transformer having a magnetic flux guide. The flux guide includes a magnetoelastic section having a magnetoelastic subsection configured to be strainable by deformation of the mechanically deformable region. In transformer embodiments, one or more drive coil and/or pickup coil has a width greater than the minimal width of the linking structure. Sensor embodiments include numerous configurations. The sensor is useful in methods for analyzing strain and force.