Diffraction efficiency of a small-period astronomical x-ray reflection grating fabricated using thermally activated selective topography equilibration

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McCurdy, Ross C., Miles, Drew M., McCoy, Jake A., Grisé, Fabien, McEntaffer, Randall L.. 2020-10-01. Diffraction efficiency of a small-period astronomical x-ray reflection grating fabricated using thermally activated selective topography equilibration. https://doi.org/10.1117/1.jatis.6.4.045003

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