Surface Acoustic Wave H2 and O2 Sensors Based on Conducting Metal Oxides/Langasite for Elevated Temperature Applications - presentation

Abstract

<p style="text-align: justify;"><span style="font-family: Arial; font-size: 10pt;">• </span><span style="color: black; font-family: Arial; font-size: 10pt;">SAW reflective delay line devices were designed and successfully fabricated on Langasite by patterning platinum electrodes.</span><p style="text-align: justify;"><span style="font-family: Arial; font-size: 10pt;">• </span><span style="color: black; font-family: Arial; font-size: 10pt;">Fabricated devices successfully tested up to 500°C for temperature sensing applications.</span><p style="text-align: justify;"><span style="font-family: Arial; font-size: 10pt;">• </span><span style="color: black; font-family: Arial; font-size: 10pt;">Indium oxide (IO) and indium tin oxide (ITO) sensing layers were developed on the SAW devices using sputtering and sol-gel method.</span><p style="text-align: justify;"><span style="font-family: Arial; font-size: 10pt;">• </span><span style="color: black; font-family: Arial; font-size: 10pt;">IO- and ITO-functionalized langasite SAW reflective delay line devices were used for sensing H2 and O2 at 350°C. </span><br>