DOE OSTI · 1769364
Challenge and opportunity in remote epitaxy
Abstract
The tutorial focuses on the fundamentals and applications of heterogeneously integrated structures using 1D, 2D, and 3D materials from the growth of 3D materials on 2D materials, and various lift-off technologies to heterogeneous integration of electronic/optoelectronic devices.
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Kim, Jeehwan. 2020-11-28. Challenge and opportunity in remote epitaxy. https://doi.org/10.2172/1769364
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