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DOE OSTI · 1805435

Doped gate dielectric materials

Abstract

A field effect transistor having at least a gate, source, and drain electrodes and a semiconductor channel for controlling transport of charge carriers between the source and drain electrodes, the gate being insulated from the channel by an dielectric, at least a portion of the dielectric disposed between the gate electrode and the semiconductor channel being doped or imbued with the an element which if doped or imbued into a semiconductor material would cause the semiconductor to be p-type. The p-type element used to dope or imbue the gate dielectric is preferably Mg.

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BibTeXRIS

Cao, Yu, Chu, Rongming, Li, Zijian Ray. 2021-01-26. Doped gate dielectric materials. https://www.osti.gov/biblio/1805435

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