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DOE OSTI · 1818837

Grazing-incidence X-ray diffraction tomography for characterizing organic thin films

Tsai, Esther H. R. (ORCID:0000000258856317)·Xia, Yu·Fukuto, Masafumi·Loo, Yueh-Lin·Li, Ruipeng
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Abstract

Characterization of thin films is of paramount importance for evaluating material processing outcomes/efficiency as well as establishing structure–property/performance relationships. This article introduces grazing-incidence diffraction tomography (GID tomography), a technique that combines grazing-incidence X-ray scattering and computed tomography to quantitatively determine the dimension and orientation of crystalline domains in thin films without restrictions on the beam coherence, substrate type or film thickness. This computational method extends the capability of synchrotron beamlines by utilizing standard X-ray scattering experiment setups.

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36 MATERIALS SCIENCE

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Tsai, Esther H. R. (ORCID:0000000258856317), Xia, Yu, Fukuto, Masafumi, Loo, Yueh-Lin, Li, Ruipeng. 2021-09-04. Grazing-incidence X-ray diffraction tomography for characterizing organic thin films. https://doi.org/10.1107/s1600576721007184

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36 MATERIALS SCIENCE↗