Combined EDS and EBSD dataset from TiB2 ceramic material

Abstract

This is supplemental information to a paper to be submitted, tentatively titled Cluster analysis of combined EDS and EBSD data to solve ambiguous phase identifications. Data was acquired from a TiB2 ceramic provided by Missouri University of Science and Technology. Simultaneous EDS and EBSD were acquired on a Tescan MIRA3 GMH field-emission SEM equipped with Oxford Instruments Symmetry CMOS-based EBSD detector and Oxford Instruments UltimMax 170 mm2 silicon-drift detector EDS. Data was acquired using Oxford Instruments AZtec 4.0 software. Data was acquired at 20 keV, 70° tilt, and ≈1 nA probe current. An 80×60 pixel, 40×30 μm map (500 nm pixel pitch) was acquired. EBSD indexing was performed using TiB2, space group 191 P6/mmm, and TiC, space group 225 Fm \bar{3}m, crystal cards.