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DOE OSTI · 1889157

A new Kirkpatrick–Baez-based scanning microscope for the Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II

Nazaretski, E.·Coburn, D. S.·Xu, W.·Ma, J.·Xu, H.·Smith, R.·Huang, X.·Yang, Y.·Huang, L.·Idir, M.·Kiss, A.·Chu, Y. S.
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Abstract

The development, construction, and first commissioning results of a new scanning microscope installed at the 5-ID Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II are reported. The developed system utilizes Kirkpatrick–Baez mirrors for X-ray focusing. The instrument is designed to enable spectromicroscopy measurements in 2D and 3D with sub-200 nm spatial resolution. The present paper focuses on the design aspects, optical considerations, and specifics of the sample scanning stage, summarizing some of the initial commissioning results.

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36 MATERIALS SCIENCE

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Nazaretski, E., Coburn, D. S., Xu, W., Ma, J., Xu, H., Smith, R., Huang, X., Yang, Y., Huang, L., Idir, M., Kiss, A., Chu, Y. S.. 2022-07-29. A new Kirkpatrick–Baez-based scanning microscope for the Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II. https://doi.org/10.1107/s1600577522007056

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36 MATERIALS SCIENCE↗