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DOE OSTI · 1993159

Deep learning enables nanoscale X-ray 3D imaging with limited data

Zhao, Chonghang·Yan, Hanfei
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Abstract

Deep neural network can greatly improve tomography reconstruction with limited data. A recent effort of combining ptycho-tomography model with the 3D U-net demonstrated a significant reduction in both the number of projections and computation time, and showed its potential for integrated circuit imaging that requires high-resolution and fast measurement speed.

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BibTeXRIS

Zhao, Chonghang, Yan, Hanfei. 2023-06-27. Deep learning enables nanoscale X-ray 3D imaging with limited data. https://doi.org/10.1038/s41377-023-01198-z

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