DOE OSTI · 2002069
Area-Selective Atomic Layer Deposition Templated by Atomic Precision Fabrication.
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Frederick, Esther, Campbell, Quinn, Dwyer, Kevin, Robertson, Luke, Dryer, Michael, Schmucker, Scott, Wheeler, David, Misra, Shashank, Butera, Robert. 2022-03-01. Area-Selective Atomic Layer Deposition Templated by Atomic Precision Fabrication.. https://doi.org/10.2172/2002069
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