DOE OSTI · 2222132
Arbitrary electron dose waveforms for electron microscopy
Abstract
A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.
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Bloom, Ruth Shewmon, Reed, Bryan Walter, Masiel, Daniel Joseph, Park, Sang Tae. 2023-08-15. Arbitrary electron dose waveforms for electron microscopy. https://www.osti.gov/biblio/2222132
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