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DOE OSTI · 22412719

Spatial filter based light-sheet laser interference technique for three-dimensional nanolithography

Mohan, Kavya·Mondal, Partha Pratim
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Abstract

We propose a laser interference technique for the fabrication of 3D nano-structures. This is possible with the introduction of specialized spatial filter in a 2π cylindrical lens system (consists of two opposing cylindrical lens sharing a common geometrical focus). The spatial filter at the back-aperture of a cylindrical lens gives rise to multiple light-sheet patterns. Two such interfering counter-propagating light-sheet pattern result in periodic 3D nano-pillar structure. This technique overcomes the existing slow point-by-point scanning, and has the ability to pattern selectively over a large volume. The proposed technique allows large-scale fabrication of periodic structures. Computational study shows a field-of-view (patterning volume) of approximately 12.2 mm{sup 3} with the pillar-size of 80 nm and inter-pillar separation of 180 nm. Applications are in nano-waveguides, 3D nano-electronics, photonic crystals, and optical microscopy.

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71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICSAPERTURESAPPROXIMATIONSCRYSTALSCYLINDRICAL CONFIGURATIONFABRICATIONFILTERSINTERFERENCELASERSLENSESNANOSTRUCTURESOPTICAL MICROSCOPYPERIODICITYSHEETSTHREE-DIMENSIONAL CALCULATIONSTHREE-DIMENSIONAL LATTICESVISIBLE RADIATIONWAVEGUIDES

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Mohan, Kavya, Mondal, Partha Pratim. 2015-02-23. Spatial filter based light-sheet laser interference technique for three-dimensional nanolithography. https://doi.org/10.1063/1.4913704

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