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DOE OSTI · 2372721

High-Precision Low-Cost Micro Birdbath Resonating Gyroscope (CRADA Final Report)

Sonsteng, Melanie
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Abstract

As part of the Cyclotron Road program, Enertia Microsystems Inc. (EMI) investigated a high-performance micro mechanical resonator called the micro birdbath resonator and a high-precision micro electromechanical systems (MEMS) gyroscope called the birdbath resonator gyroscope (BRG). The BRG is a novel fused-silica MEMS gyroscope. The BRG can obtain significantly greater accuracy, comparable size, and comparable cost with MEMS gyroscopes made of silicon that are currently on the market.

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BibTeXRIS

Sonsteng, Melanie. 2024-06-13. High-Precision Low-Cost Micro Birdbath Resonating Gyroscope (CRADA Final Report). https://doi.org/10.2172/2372721

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