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DOE OSTI · 2420237

Surface analysis insight note: Synthetic line shapes, integration regions and relative sensitivity factors

Fernandez, Vincent·Fairley, Neal·Baltrusaitis, Jonas
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Abstract

Here, methods for estimating photoemission intensity from X-ray photoelectron spectroscopy data are examined. The role played by “synthetic” bell-shaped curves, integration intervals, background curves, and the use of relative sensitivity factors (RSFs) in reporting percentage atomic concentration for a sample is presented. In particular, photoemission lines with differing energy distributions obtained from the NaCl sample surface are used to demonstrate how a comparison of photoemission intensities is dependent on the line shapes, background curves, and appropriate use of RSFs.

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Fernandez, Vincent, Fairley, Neal, Baltrusaitis, Jonas. 2022-10-06. Surface analysis insight note: Synthetic line shapes, integration regions and relative sensitivity factors. https://doi.org/10.1002/sia.7155

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