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DOE OSTI · 2514370

Atomic Electron Tomography of Thin Films

Bhalla-Levine, Aviram·Park, Kunwoo·Park, Jungwon·Ercius, Peter·Miao, Jianwei
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Abstract

In the past decade, the development of atomic electron tomography (AET) [1] has allowed for the 3D characterization of atomic positions in nanoparticle [2], monolayer [3], and needle [4] geometries. Furthermore, many technologically important systems are synthesized and utilized as thin films. Several challenges in sample preparation and data analysis have been overcome to expand the scope of AET to these systems. Polycrystalline yttrium-doped hafnium dioxide (HfO 2 ) was chosen as a model system, because it is technologically relevant as a high capacitance dielectric and ferroelectric.

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74 ATOMIC AND MOLECULAR PHYSICS

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Bhalla-Levine, Aviram, Park, Kunwoo, Park, Jungwon, Ercius, Peter, Miao, Jianwei. 2024-07-24. Atomic Electron Tomography of Thin Films. https://doi.org/10.1093/mam%2Fozae044.888

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